A Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon

نویسندگان

  • Fei Duan
  • Jiwei Jiao
  • Yucai Wang
  • Ying Zhang
  • Binwei Mi
  • Jinpeng Li
  • Jian Zhu
  • Yuelin Wang
چکیده

A novel x-axis tuning fork MEMS gyroscope with “8 vertical springs-proofmass” structure for Coriolis effect detection is presented. Compared with the common single-plane springs, the 8 vertical springs, symmetrically located at the top and bottom sides, more stably suspend the large thick proofmass featuring large capacitance variation and low mechanical noise. A bulkmicromachining technology is applied to obtain the large proofmass and twins-like dual beams. During the fabrication process, the dimensions of the 8 vertical springs are precisely confined by thermal oxide protected limit trenches (LTs) sidewalls and the extreme slowly etched (111)-planes; therefore a small mismatch of less than 30 Hz is achieved before tuning. Initial test shows a sensitivity of 0.15mV/(deg/s) and rate resolution around 0.1deg/s under atmosphere pressure. Keywords—x-axis gyroscope, tuning fork, vertical springs, limit trench, (111) silicon

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عنوان ژورنال:
  • CoRR

دوره abs/0802.3038  شماره 

صفحات  -

تاریخ انتشار 2007